Display Device

ABSTRACT

A display device includes: a substrate; a light emitting diode disposed above the substrate; a first transistor disposed above the substrate; and a second transistor disposed above the substrate. The first transistor includes: a first semiconductor including a silicon semiconductor; a gate electrode disposed above the first semiconductor; and a first drain electrode electrically connected to the first semiconductor, wherein the first drain electrode is electrically connected to the light emitting diode. The second transistor includes: a second semiconductor including an oxide semiconductor; and a second drain electrode electrically connected to the second semiconductor, wherein the second drain electrode is electrically connected to the gate electrode of the first transistor.

CROSS REFERENCE TO RELATED APPLICATION

This application claims the benefit of filing date of U.S. ProvisionalApplication Ser. Nos. 62/319,965, 62/337,384 and 62/382,281,respectively filed April 8, May 17, and Sep. 1, 2016 under 35 USC §119(e)(1).

This application is a continuation application of U.S. patentapplication for “Display Device”, U.S. application Ser. No. 16/136,860filed Sep. 20, 2018, U.S. application Ser. No. 16/136,860 is acontinuation application of U.S. patent application for “DisplayDevice”, U.S. application Ser. No. 15/441,329 filed Feb. 24, 2017, andthe subject matter of which is incorporated herein by reference.

BACKGROUND 1. Field

The present disclosure relates to display devices, and more particularlyto a display device comprising both a low-temperature polycrystallinesilicon (LTPS) thin film transistor and an oxide thin film transistor.

2. Description of Related Art

With the continuous advancement of technologies related to displays, allthe display panels are now developed toward compactness, thinness, andlightness. This trend makes thin displays, such as liquid crystaldisplay panels, organic light-emitting diode display panels andinorganic light-emitting diode display panels, replacingcathode-ray-tube displays as the mainstream display devices on themarket. Applications of thin displays are numerous. Most electronicproducts for daily use, such as mobile phones, notebook computers, videocameras, still cameras, music displays, mobile navigators, and TV sets,employ such display panels.

While liquid crystal display devices and organic light-emitting diodedisplay devices are popular on the market, in which LCD display devicesparticularly enjoy technical maturity, manufacturers pay even moreeffort to improve display devices in terms of display quality therebyanswering to ongoing technical development of display devices andconsumers' increasing demands.

The thin film transistor (TFT) structure can be polycrystalline siliconthin film transistors (TFT) featuring high carrier mobility, or metaloxide thin film transistors (TFT) featuring low leakage. There arepresently no displays combining these two types of transistors becausethe manufacturing processes for making the two are not quite compatible,making the overall manufacturing of such display devices complicated(such as by requiring more times of chemical vapor deposition).Moreover, in a single pixel unit of the organic light-emitting diodedisplay device, there are at least three thin film transistor (TFT)units, so the light-emitting area is limited and production of the thinfilm transistor (TFT) substrate is complicated.

In view of this, a need exists for an improved and simplified processfor manufacturing a thin film transistor (TFT) substrate that has both apolycrystalline silicon thin film transistor (TFT) and a metal oxidethin film transistor (TFT).

SUMMARY

The object of the present disclosure is to provide a display device,which has both a LTPS thin film transistor and an oxide thin filmtransistor at the same time.

The display device of the present disclosure comprises: a substrate; alight emitting diode disposed above the substrate; a first transistordisposed above the substrate; and a second transistor disposed above thesubstrate. The first transistor comprises: a first semiconductor layer;a first top gate electrode disposed above the first semiconductor layer;a first bottom gate electrode disposed under the first semiconductorlayer; a first source electrode electrically connected to the firstsemiconductor layer; and a first drain electrode electrically connectedto the first semiconductor layer, wherein the first drain electrode iselectrically connected to the light emitting diode. In addition, thesecond transistor comprises: a second semiconductor layer. Herein, oneof the first semiconductor layer and the second semiconductor layercomprises a first silicon semiconductor layer, and the other comprises afirst oxide semiconductor layer.

In the display device of the present disclosure, the first transistor isserved as a driving TFT. The first transistor has a double gatestructure comprising the first top gate electrode and the first bottomelectrode, and the first top gate electrode and the first bottomelectrode are respectively disposed at two sides of the firstsemiconductor layer. When the first transistor has the aforesaid doublegate structure, ON current or electron charging speed of the firsttransistor can be improved. In addition, the first bottom gate electrodecan also function as a light shielding means, to prevent light-inducedcurrent leakage or light-induced instability of the first transistor.

Other objects, advantages, and novel features of the present disclosurewill become more apparent from the following detailed description whentaken in conjunction with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic cross sectional view of a display device accordingEmbodiment 1 of the present disclosure.

FIG. 2 is an equivalent-circuit diagram of a pixel of the display deviceaccording to Embodiment 1 of the present disclosure.

FIG. 3 is a schematic voltage vs. current diagram showing the ON currentshift between a single gate LTPS TFT and a double gate LTPS TFT.

FIG. 4 is a schematic cross sectional view of the display deviceaccording to Embodiment 1-1 of the present disclosure.

FIG. 5 is a schematic cross sectional view of the display deviceaccording to Embodiment 1-2 of the present disclosure.

FIG. 6 is a schematic cross sectional view of the display deviceaccording to Embodiment 1-3 of the present disclosure.

FIG. 7A is a schematic voltage vs. current diagram showing the ONcurrent shift between a single gate IGZO TFT and a double gate IGZO TFT.

FIG. 7B is a schematic voltage vs. current diagram showing the Vth shiftbetween a single gate IGZO TFT and a double gate IGZO TFT after 1 houroperation.

FIG. 8 is a schematic cross sectional view of the display deviceaccording to Embodiment 2-1 of the present disclosure.

FIG. 9 is a schematic cross sectional view of the display deviceaccording to Embodiment 2-2 of the present disclosure.

FIG. 10 is a schematic cross sectional view of the display deviceaccording to Embodiment 2-3 of the present disclosure.

FIG. 11A is a schematic voltage vs. current diagram showing the OFFcurrent shift between a single gate LTPS TFT and a double gate LTPS TFT.

FIG. 11B is a schematic voltage vs. current diagram showing the ONcurrent shift and the Vth shift between a single gate IGZO TFT and adouble gate IGZO TFT.

FIG. 11C is a schematic voltage vs. current diagram showing the Vthshift between a single gate IGZO TFT and a double gate IGZO TFT after5000 sec operation.

FIGS. 12A to 12C are schematic top views showing the relations betweenthe top gate electrodes and the semiconductor layer in the dual gatestructure according to Alternative embodiment 1 of the presentdisclosure.

FIG. 13 is a schematic cross sectional view of the display deviceaccording to Alternative embodiment 2 of the present disclosure.

FIGS. 14A and 14B are schematic cross sectional views of the displaydevice according to Alternative embodiment 3 of the present disclosure.

FIG. 15 is a schematic cross sectional view of the display deviceaccording to Alternative embodiment 3 of the present disclosure.

DETAILED DESCRIPTION OF EMBODIMENT

The following embodiments when read with the accompanying drawings aremade to clearly exhibit the above-mentioned and other technicalcontents, features and effects of the present disclosure. Through theexposition by means of the specific embodiments, people would furtherunderstand the technical means and effects the present disclosure adoptsto achieve the above-indicated objectives. Moreover, as the contentsdisclosed herein should be readily understood and can be implemented bya person skilled in the art, all equivalent changes or modificationswhich do not depart from the concept of the present disclosure should beencompassed by the appended claims.

Furthermore, the ordinals recited in the specification and the claimssuch as “first”, “second” and so on are intended only to describe theelements claimed and imply or represent neither that the claimedelements have any proceeding ordinals, nor that sequence between oneclaimed element and another claimed element or between steps of amanufacturing method. The use of these ordinals is merely todifferentiate one claimed element having a certain designation fromanother claimed element having the same designation.

Furthermore, the ordinals recited in the specification and the claimssuch as “above”, “over”, or “on” are intended not only directly contactwith the other substrate or film, but also intended indirectly contactwith the other substrate or film.

In the following embodiments, the term “single gate” refers to a thinfilm transistor with only one gate electrode. The term “double gate”refers to a thin film transistor with two gate electrodes respectivelydisposed at two sides of a semiconductor layer. The term “dual gate”refers to a thin film transistor with two gate electrodes simultaneouslydisposed at one side of a semiconductor layer. In addition, the term“double gate LTPS/IGZO TFT” refers to the LTPS/IGZO with the double gatestructure. The term “dual gate LTPS/IGZO TFT” refers to the LTPS/IGZOwith the dual gate structure. The term “single gate LTPS/IGZO TFT”refers to the LTPS/IGSO with the single gate structure.

Embodiment 1

FIG. 1 is a schematic cross sectional view a display device of thepresent embodiment. Therein, the display device comprises: a firstsubstrate 1; a second substrate 2 opposite to the first substrate 1; anda display medium layer 3 arranged between the first substrate 1 and thesecond substrate 2. In the present embodiment, the first substrate 1 andthe second substrate 2 may be prepared by glass, plastic, a flexiblematerial or a thin film; but the present disclosure is not limitedthereto. When the first substrate 1 and the second substrate 2 isprepared by plastic, the flexible material or the thin film, the displaydevice can be a flexible display device. In the present embodiment, thedisplay medium 3 may comprise a light emitting diode, for example, aninorganic light emitting diode or an organic light emitting diode; butthe present disclosure is not limited thereto. In the present embodimentand the following embodiments of the present disclosure, the displaymedium 3 comprises an organic light emitting diode, and thus the displaydevice is an organic light-emitting diode display device. In addition,in other embodiments of the present disclosure, the display device canbe optionally made without the second substrate 2.

In the display device of the present embodiment, the first substrate 1is provided with a plurality of pixel units (not shown in the figure).One of these pixel units may be designed as, for example, theequivalent-circuit diagram as shown in FIG. 2. In the equivalent-circuitdiagram of FIG. 2, the pixel comprises: a driving thin film transistorT1; a switching thin film transistor T2, wherein a scan signal Sn and adata signal Data are transferred to the switching thin film transistorT2; a reset thin film transistor T3, wherein an initialization voltageVini and a reset signal RST are transferred to the reset thin filmtransistor T3 for initializing the driving thin film transistor T1; anemitting thin film transistor T4, wherein an emission control signal Enis transferred to the emitting thin film transistor T4; a firstcapacitor C1; and a second capacitor Cst. Hence, the equivalent-circuitdiagram shown in FIG. 2 is a 4T2C circuit. In addition, a drivingvoltage ELVDD is transferred to an organic light emitting diode OLED;and a cathode of the organic light emitting diode OLED is connected to acommon voltage ELVSS.

In the present embodiment, the driving thin film transistor T1 is a LTPSthin film transistor with a double gate structure.

FIG. 3 is a schematic voltage vs. current diagram showing the ON currentshift between a single gate LTPS TFT and a double gate LTPS TFT. Asshown in FIG. 3, the ON current of the double gate LTPS TFT is largerthan that of the single gate LTPS TFT. This result indicates that whenthe driving thin film transistor T1 is a LTPS TFT with the double gatestructure, the charging ability thereof can be improved, the ON currentcan be increased, and a better current stability can be achieved.Furthermore, the bottom gate of the LTPS TFT can also be used as a lightshielding layer.

Hereinafter, three aspects of the display devices of Embodiment 1 areexemplified, in which the driving thin film transistor T1 is a LTPS TFTwith the double gate structure. However, the present disclosure is notlimited thereto.

Embodiment 1-1

FIG. 4 is a schematic cross sectional view of the display device of thepresent embodiment. The process for preparing the display device of thepresent embodiment is briefly described below.

First, a first substrate 1 is provided, and a first buffer layer 10 isformed on the first substrate 1. Next, a first metal layer comprising afirst bottom gate 11, a second bottom gate 21, a third bottom gate 31and a fourth bottom gate 41 are formed on the first buffer layer 10;wherein the dashed line between the second bottom gates 21 means thesecond bottom gates 21 are linked in another cross sectional view, andthe dashed line between the fourth bottom gates 41 also means the fourthbottom gates 41 are linked in further another cross sectional view.Then, a second buffer layer 101 is formed on the metal layer and thefirst buffer layer 10.

Next, a silicon semiconductor layer and an oxide semiconductor layer areformed. Herein, the silicon semiconductor layer is a low temperaturepolysilicon layer, and parts of the silicon semiconductor layer aredoped to adjust their electrical conductivity to form electrodes. Afterthe doping process, a first source electrode 13, and a first drainelectrode 14 are formed.

In addition, the oxide semiconductor layer is a metal oxide layer; andin regions of the oxide semiconductor layer to be formed as electrodes,the electrical conductivity of these regions can be adjusted by hydrogendiffusion from insulating layers formed on these regions. The metaloxide layer can be a zinc-oxide-based metal oxide layer, for example,IGZO, ITZO, IGTZO or the like. Hereinafter, the metal oxide layer beingan IGZO layer is exemplified, but the present disclosure is not limitedthereto.

After the aforesaid process, a second semiconductor layer 22, a secondsource electrode 23, a second drain electrode 24, a third semiconductorlayer 32, a third source electrode 33, a third drain electrode 34, afourth semiconductor layer 42, a fourth source electrode 43 and a fourthdrain electrode 44 are formed.

Next, a gate insulating layer 102 is formed on the silicon semiconductorlayer and the oxide semiconductor layer. A second metal layer is formedon the gate insulating layer 102; wherein the second metal layercomprises a first top gate electrode 15, a second top gate electrode 25,a third top gate electrode 35, a fourth top gate electrode 45 and acapacitor electrode 51. Similarly, the dashed lines between the firsttop gate electrodes 15, the second top gate electrodes 25 as well as thefourth top gate electrodes 45 means the first top gate electrodes 15,the second top gate electrodes 25 as well as the fourth top gateelectrodes 45 are linked in further another cross sectional view. Itshould be noted that the third top gate electrode 35 is connected to thethird bottom gate 31 through an additional via and are not linked withthe third drain electrode 34. Meanwhile, the capacitor electrode 51 arenot linked with any of the gate electrodes mentioned above, but areprovided with ELVDD voltage level and are electrically coupled with thefirst drain electrode 14 to produce a first capacitor C1.

An insulating layer 103 is formed on the second metal layer, followed byforming a third metal layer including circuit lines DATA, VDD. Apassivation layer 104 is formed on the insulating layer 103 and thethird metal layer, and a planer layer 105 is formed on the passivationlayer 105.

An anode 71 penetrating through the planer layer 105 and the passivationlayer 104 is then formed on the planer layer 105. A pixel defining layer106 is then formed on the anode 71 and the planer layer 105; wherein thepixel defining layer 106 has an opening 1061 to expose partial anode 71.A light emitting layer 72 which is an organic emitting layer is thenformed in the opening 1061. Finally, a cathode 73 is formed on the pixeldefining layer 106 and the light emitting layer 72.

Herein, the first buffer layer 10, the second buffer layer 101, the gateinsulating layer 102, the insulating layer 103, the passivation layer104 and the planer layer 105 can be prepared by silicon oxide or siliconnitride, or may be a layered structure made of silicon nitride andsilicon oxide. However, the present disclosure is not limited thereto.The pixel defining layer 106 can be prepared by any resin material. Thefirst metal layer, the second metal layer and the third metal layer canbe prepared by metals (such as Cu, Al, Ti, Cr, Mo, or alloy thereof) orother electrode materials. The anode 71 can be a reflective electrodewhich can be prepared by Al or Ag; but the present disclosure is notlimited thereto. The cathode 73 can be a transparent electrode which canbe prepared by transparent conductive oxides such as ITO, IZO, ITZO andso on; but the present disclosure is not limited thereto.

After the aforementioned process, the display device of the presentembodiment is obtained. The display device comprises: a substrate 1, alight emitting diode (including the anode 71, the light emitting layer72 and the cathode 73) disposed above the substrate 1; a driving thinfilm transistor T1, a switching thin film transistor T2, a reset thinfilm transistor T3 and an emitting thin film transistor T4 disposedabove the substrate 1; a first capacitor C1 disposed above the substrate1; and a second capacitor Cst disposed above the substrate. In thepresent embodiment, all the driving thin film transistor T1, theswitching thin film transistor T2, the reset thin film transistor T3 andthe emitting thin film transistor T4 have double gate structures.

The driving thin film transistor T1 is a LTPS TFT, which comprises: afirst semiconductor layer 12; a first top gate electrode 15 disposedabove the first semiconductor layer 12; a first bottom gate 11 disposedunder the first semiconductor layer 12; a first source electrode 13electrically connected to the first semiconductor layer 12; a firstdrain electrode 14 electrically connected to the first semiconductorlayer 12, wherein the first drain electrode 14 is electrically connectedto the light emitting diode (including the anode 71, the light emittinglayer 72 and the cathode 73). Herein, the first semiconductor layer 12,the first source electrode 13 and the first drain electrode 14 comprisea silicon semiconductor layer and are integrated. The first sourceelectrode 13 and the first drain electrode 14 are disposed below thefirst top gate electrode 15.

The switching thin film transistor T2 is an IGZO TFT, which comprises: asecond semiconductor layer 22; a second top gate electrode 25 disposedabove the second semiconductor layer 22; a second bottom gate 21disposed under the second semiconductor layer 22; a second sourceelectrode 23 electrically connected to the second semiconductor layer22; a second drain electrode 24 electrically connected to the secondsemiconductor layer 22. Herein, the second semiconductor layer 22, thesecond source electrode 23 and the second drain electrode 24 comprise anoxide semiconductor layer and are integrated. The second sourceelectrode 23 and the second drain electrode 24 are disposed below thesecond top gate electrode 25. In addition, the second drain electrode 24is electrically connected to the first top gate electrode 15 via a metallayer 81.

The reset thin film transistor T3 is an IGZO TFT, which comprises: athird semiconductor layer 32; a third top gate electrode 35 disposedabove the third semiconductor layer 32; a third bottom gate 31 disposedunder the third semiconductor layer 32; a third source electrode 33electrically connected to the third semiconductor layer 32; a thirddrain electrode 34 electrically connected to the third semiconductorlayer 32. Herein, the third semiconductor layer 32, the third sourceelectrode 33 and the third drain electrode 34 comprise an oxidesemiconductor layer and are integrated. The third source electrode 33and the third drain electrode 34 are disposed below the third top gateelectrode 35.

The emitting thin film transistor T4 is an IGZO TFT, which comprises: afourth semiconductor layer 42; a fourth top gate electrode 45 disposedabove the fourth semiconductor layer 42; a fourth bottom gate 41disposed under the fourth semiconductor layer 42; a fourth sourceelectrode 43 electrically connected to the fourth semiconductor layer42; a fourth drain electrode 44 electrically connected to the fourthsemiconductor layer 42. Herein, the fourth semiconductor layer 42, thefourth source electrode 43 and the fourth drain electrode 44 comprise anoxide semiconductor layer and are integrated. The fourth sourceelectrode 43 and the fourth drain electrode 44 are disposed below thefourth top gate electrode 45. In addition, the fourth drain electrode 44is electrically connected to the first top gate electrode 15 via directcontact.

The first capacitor C1 comprises a capacitor electrode 51. The firstdrain electrode 14 is extended as another capacitor electrode of thefirst capacitor C1, and the capacitor electrode 51 and the first drainelectrode 14 partially overlap. In addition, the first capacitor C1 isalso electrically connected to the reset thin film transistor T3 througha conductive line 52.

The second capacitor Cst comprises a fifth semiconductor layer 61 as acapacitor electrode, and the fifth semiconductor layer 61 includes asilicon semiconductor layer. In addition, the first top gate electrode15 is also extended as another capacitor electrode of the secondcapacitor Cst, and the fifth semiconductor layer 61 and the first topgate electrode 15 partially overlap.

Embodiment 1-2

FIG. 5 is a schematic cross sectional view of the display device of thepresent embodiment. The preparation process and the structure of thedisplay device of the present embodiment are similar to those ofEmbodiment 1-1, except for the following differences.

In Embodiment 1-1, the driving thin film transistor T1 is a LTPS TFT,the switching thin film transistor T2 and the reset thin film transistorT3 are IGZO TFTs. In the present embodiment, the driving thin filmtransistor T1 is a LTPS TFT, the switching thin film transistor T2 andthe reset thin film transistor T3 are LTPS TFTs, and the emitting thinfilm transistor T4 is an IGZO TFT.

The process for preparing the switching thin film transistor T2 and thereset thin film transistor T3 are similar to that for preparing thedriving thin film transistor T1, except for the following differences.

When forming the semiconductor layers of the switching thin filmtransistor T2 and the reset thin film transistor T3, two secondsemiconductor regions 221, 222 and two third semiconductor regions 321,322 are respectively defined. In addition, when forming the top gates ofthe switching thin film transistor T2 and the reset thin film transistorT3, two second top gate electrodes 251, 252 and two third top gateelectrodes 351, 352 are respectively defined. Hence, in the presentembodiment, the switching thin film transistor T2 and the reset thinfilm transistor T3 are respectively LTPS TFTs with dual gate structures.

The switching thin film transistor T2 is an LTPS TFT, which comprises:two second semiconductor regions 221, 222; two second top gateelectrodes 251, 252 disposed above and respectively corresponding to thetwo second semiconductor regions 221, 222; a second source electrode 23electrically connected to the second semiconductor region 221; and asecond drain electrode 24 electrically connected to the secondsemiconductor region 222. Herein, the second semiconductor regions 221,222, the second source electrode 23 and the second drain electrode 24comprise a silicon semiconductor layer and are integrated. The secondsource electrode 23 and the second drain electrode 24 are disposed belowthe second top gate electrodes 251, 252.

The reset thin film transistor T3 is an LTPS TFT, which comprises: twothird semiconductor regions 321, 322; two third top gate electrodes 351,352 disposed above and respectively corresponding to the two thirdsemiconductor regions 321, 322; a third source electrode 33 electricallyconnected to the third semiconductor region 321; and a third drainelectrode 34 electrically connected to the third semiconductor region322. Herein, the third semiconductor regions 321, 322, the third sourceelectrode 33 and the third drain electrode 34 comprise a siliconsemiconductor layer and are integrated. The third source electrode 33and the third drain electrode 34 are disposed below the third top gateelectrodes 351, 352.

Embodiment 1-3

FIG. 6 is a schematic cross sectional view of the display device of thepresent embodiment. The preparation process and the structure of thedisplay device of the present embodiment are similar to those ofEmbodiment 1-1, except for the following differences.

In Embodiment 1-1, the reset thin film transistor T3 is an IGZO TFT. Inthe present embodiment, the reset thin film transistor T3 is an LTPSTFT. The preparation process and the structure of the reset thin filmtransistor T3 in the present embodiment are similar to those of thereset thin film transistor T3 in Embodiment 1-2. Hence, the descriptionsthereof are not repeated herein.

Embodiment 2

The display device of the present embodiment is similar to that ofEmbodiment 1. The main difference between the display devices ofEmbodiment 1 and the present embodiment is that the driving thin filmtransistor T1 of the present embodiment is an IGZO thin film transistorwith a double gate structure.

FIG. 7A is a schematic voltage vs. current diagram showing the ONcurrent shift between a single gate IGZO TFT and a double gate IGZO TFT.As shown in FIG. 7A, the ON current of the double gate IGZO TFT islarger than that of the single gate IGZO TFT, and positive Vth shift isoccurred in the double gate IGZO TFT compared to the single gate IGZOTFT.

FIG. 7B is a schematic voltage vs. current diagram showing the Vth shiftbetween a single gate IGZO TFT and a double gate IGZO TFT after 1 houroperation of voltage of drain electrode at 20 Volts and voltage of gateelectrode at 20 Volts. As shown in FIG. 7B, under high current stabilitytest, Vth shift of the double gate IGZO TFT is less than Vth shift ofthe single gate IGZO TFT. This result indicates that the double gateIGZO TFT has better stability compared to the single gate IGZO TFT.

Hence, when the double gate IGZO TFT is used as the driving thin filmtransistor T1, the advantages of higher ON current, larger Vth, betterhigh current stability, better threshold voltage uniformity, and/orbrightness variations decreased can be achieved. In addition, the bottomgate can also be used as a light shielding layer.

Hereinafter, three aspects of the display devices of Embodiment 2 areexemplified, in which the driving thin film transistor T1 is an IGZO TFTwith the double gate structure. However, the present disclosure is notlimited thereto.

Embodiment 2-1

FIG. 8 is a schematic cross sectional view of the display device of thepresent embodiment. In the present embodiment, the driving thin filmtransistor T1 is an IGZO TFT with a double gate structure; the switchingthin film transistor T2 is an LTPS TFT with a double gate structure aswell as a dual gate structure; the reset thin film transistor T3 is anLTPS TFT with a double gate structure; and the emitting thin filmtransistor T4 is an LTPS TFT with a dual gate structure. The process andstructure of the IGZO TFT of the present embodiment is similar to thoseillustrated in Embodiment 1, and the process and structure of the LTPSTFT of the present embodiment is also similar to those illustrate inEmbodiment 1.

The driving thin film transistor T1 is an IGZO TFT, which comprises: afirst semiconductor layer 12; a first top gate electrode 15 disposedabove the first semiconductor layer 12; a first bottom gate 11 disposedunder the first semiconductor layer 12; a first source electrode 13electrically connected to the first semiconductor layer 12; a firstdrain electrode 14 electrically connected to the first semiconductorlayer 12, wherein the first drain electrode 14 is electrically connectedto the light emitting diode (including the anode 71, the light emittinglayer 72 and the cathode 73). Herein, the first semiconductor layer 12,the first source electrode 13 and the first drain electrode 14 comprisean oxide semiconductor layer and are integrated. The first sourceelectrode 13 and the first drain electrode 14 are disposed below thefirst top gate electrode 15.

When forming the bottom gate and the top gate of the switching thin filmtransistor T2, two second bottom gate electrodes 211, 212 and two secondtop gate electrodes 251, 252 are respectively defined. Hence, in thepresent embodiment the switching thin film transistor T2 has double gateas well as dual gate structures.

The switching thin film transistor T2 is an LTPS TFT, which comprises:two second semiconductor regions 221, 222; two second top gateelectrodes 251, 252 disposed above and respectively corresponding to thetwo second semiconductor regions 221, 222; two second bottom gates 211,212 disposed under and respectively corresponding to the two secondsemiconductor regions 221, 222; a second source electrode 23electrically connected to the second semiconductor region 221; a seconddrain electrode 24 electrically connected to the second semiconductorregion 222. Herein, the second semiconductor regions 221, 222, thesecond source electrode 23 and the second drain electrode 24 comprise asilicon semiconductor layer and are integrated. The second sourceelectrode 23 and the second drain electrode 24 are disposed below thetwo second top gate electrodes 251, 252. In addition, the second drainelectrode 24 is electrically connected to the first top gate electrode15 via a metal layer 81.

The reset thin film transistor T3 is an LTPS TFT, which comprises: twothird semiconductor regions 321, 322; two third top gate electrodes 351,352 disposed above and respectively corresponding to the two thirdsemiconductor regions 321, 322; a third source electrode 33 electricallyconnected to the third semiconductor region 321; and a third drainelectrode 34 electrically connected to the third semiconductor region322. Herein, the third semiconductor regions 321, 322, the third sourceelectrode 33 and the third drain electrode 34 comprise a siliconsemiconductor layer and are integrated. The third source electrode 33and the third drain electrode 34 are disposed below the third top gateelectrodes 351, 352.

The emitting thin film transistor T4 is an LTPS TFT, which comprises:two fourth semiconductor regions 421, 422; two fourth top gateelectrodes 451, 452 disposed above and respectively corresponding to thetwo fourth semiconductor regions 421, 422; a fourth source electrode 43electrically connected to the fourth semiconductor region 421; and afourth drain electrode 44 electrically connected to the fourthsemiconductor region 422. Herein, the fourth semiconductor regions 421,422, the fourth source electrode 43 and the fourth drain electrode 44comprise a silicon semiconductor layer and are integrated. The fourthsource electrode 43 and the fourth drain electrode 44 are disposed belowthe fourth top gate electrodes 451, 452. In addition, the fourth drainelectrode 44 is electrically connected to the first top gate electrode15 via a conductive line 82.

The first capacitor C1 comprises a capacitor electrode 51. The firstdrain electrode 14 is extended as another capacitor electrode of thefirst capacitor C1, and the capacitor electrode 51 and the first drainelectrode 14 partially overlap. In addition, the first capacitor C1 isalso electrically connected to the reset thin film transistor T3 througha conductive line 52.

The second capacitor Cst comprises a fifth semiconductor layer 61 as acapacitor electrode, and the fifth semiconductor layer 61 includes anoxide semiconductor layer. In addition, the first top gate electrode 15is also extended to be another capacitor electrode of the secondcapacitor Cst, and the fifth semiconductor layer 61 and the first topgate electrode 15 partially overlap.

Embodiment 2-2

FIG. 9 is a schematic cross sectional view of the display device of thepresent embodiment. The preparation process and the structure of thedisplay device of the present embodiment are similar to those ofEmbodiment 2-1, except for the following differences.

In Embodiment 2-1, the switching thin film transistor T2 and the resetthin film transistor T3 are LTPS TFTs. In the present embodiment, theswitching thin film transistor T2 and the reset thin film transistor T3are IGZO TFTs.

The preparation processes and the structures of the switching thin filmtransistor T2 and the reset thin film transistor T3 in the presentembodiment are similar to those of the switching thin film transistor T2and the reset thin film transistor T3 in Embodiment 1-1. Hence, thedescriptions thereof are not repeated herein.

Embodiment 2-3

FIG. 10 is a schematic cross sectional view of the display device of thepresent embodiment. The preparation process and the structure of thedisplay device of the present embodiment are similar to those ofEmbodiment 2-1, except for the following differences.

In Embodiment 2-1, the switching thin film transistor T2 is an LTPS TFT.In the present embodiment, the switching thin film transistor T2 is anIGZO TFT. The preparation process and the structure of the switchingthin film transistor T2 in the present embodiment are similar to thoseof the switching thin film transistor T2 in Embodiment 1-1. Hence, thedescriptions thereof are not repeated herein.

In the display devices illustrated in the aforesaid embodiments, all thetransistors including the driving thin film transistor T1, the switchingthin film transistor T2, the reset thin film transistor T3 and theemitting thin film transistor T4 have top gate structures. In addition,the first top gate electrode 15, the second top gate electrode 25, thethird top gate electrode 35 and the fourth top gate electrode 45 can beprepared at the same time. Other layers (such as semiconductor layers,bottom gates and so one) in all the transistors can also be preparedsimultaneously. Therefore, the manufacturing process of the displaydevice of the present embodiment can be simplified.

Furthermore, for the transistor with silicon semiconductor layer, theadvantages of superior control of short channel effects, high Vth,better stability and/or high ON current can be achieved. For thetransistor with oxide semiconductor layer, the advantages of highermobility and/or easy channel passivation can be achieved.

In the display devices illustrated in the aforesaid embodiments, boththe driving thin film transistor T1 and the switching thin filmtransistor T2 have the double gate structures; therefore better pixelcircuitry performance can be obtained. The reason why the driving thinfilm transistor T1 has the double gate structure is illustrated before,and not repeated again. The reason why the switching thin filmtransistor T2 also has the double gate structure is illustratedhereinafter.

The following Tables 1 to 3 show circuit simulation results, whereinTable 1 shows the result when the switching thin film transistor T2 isthe LTPS TFT with the double gate structure or the IGZO TFT with thedouble gate structure, and Tables 2 and 3 shows the result when thereset thin film transistor T3 is the LTPS TFT with the dual gate orsingle gate structure or the IGZO TFT with the dual gate or single gatestructure. In addition, in the following Tables 1 to 3, the term “VGS”refers to voltage for driving TFT at gate and source electrodes, and theterm “VGS peak to peak” refers to voltage difference between each frame.

TABLE 1 Simulation result of the switching thin film transistor T2 1frame VDATA = 0.3 V LTPS IGZO VGS  0.248 V 0.31556 V VGS peak to peak108.78 mV  16.123 mV VDATA = 2 V LTPS IGZO VGS 1.8275 V 1.9361 V VGSpeak to peak  87.84 mV 8.1521 mV

The result shown in Table 1 indicates that when the switching thin filmtransistor T2 have the double gate structure, the switching thin filmtransistor T2 have lower current leakage. Hence, VGS change can bedecreased, which means the luminance change can be reduced. Therefore,when the switching thin film transistor T2 has the double gatestructure, better pixel circuitry performance can be obtained. Inaddition, when the switching thin film transistor T2 is the IGZO TFT,better VGS peak to peak stability can also be achieved.

TABLE 2 Simulation result of the reset thin film transistor T3 with thedual gate structure 1 frame VDATA = 0.3 V LTPS IGZO VGS  0.248 V 0.24817V VGS peak to peak 108.78 mV  74.993 mV VDATA = 2 V LTPS IGZO VGS 1.8275V  1.831 V VGS peak to peak  87.84 mV 83.191 mV

TABLE 3 Simulation result of the reset thin film transistor T3 with thesingle gate structure 1 frame VDATA = 0.3 V LTPS IGZO VGS 0.24985 V0.24948 V VGS peak to peak  74.965 mV  74.991 mV VDATA = 2 V LTPS IGZOVGS 1.8291 V 1.8288 V VGS peak to peak 88.414 mV  88.41 mV

The results shown in Tables 2 and 3 indicate that the VGS change of thereset thin film transistor T3 is not significant no matter the resetthin film transistor T3 has the single gate or dual gate structure.

From the results shown in Tables 1 to 3, it can be concluded that theswitching thin film transistor T2 is an important factor for stabilizingbrightness variations in the display device.

In the present disclosure, the switching thin film transistor T2 can bethe LTPS TFT with the double gate structure. FIG. 11A is a schematicvoltage vs. current diagram showing the OFF current shift between asingle gate LTPS TFT and a double gate LTPS TFT. It is known that theLTPS TFT has high OFF current, and its OFF current is increased as theintensity of the incident light increased. As shown in FIG. 11, the OFFcurrent of the double gate LTPS TFT is less than that of the single gateLTPS TFT. It is because the bottom gate of the double gate LTPS TFT canblock the incident light which may induce higher OFF current leakage ofthe LTPS TFT. Hence, when the switching thin film transistor T2 is thedouble gate TFT, the advantage of lower OFF current, smaller VGS changeof the driving thin film transistor T1, and/or smaller brightness changecan be achieved.

In the present disclosure, the switching thin film transistor T2 canalso be the IGZO TFT with the double gate structure. FIG. 11B is aschematic voltage vs. current diagram showing the ON current shift andthe Vth shift between a single gate IGZO TFT and a double gate IGZO TFT;and FIG. 11C is a schematic voltage vs. current diagram showing the Vthshift between a single gate IGZO TFT and a double gate IGZO TFT after5000 sec operation. As shown in FIG. 11B, the ON current of the doublegate IGZO TFT is larger than that of the single gate IGZO TFT, andpositive Vth shift is occurred in the double gate IGZO TFT compared tothe single gate IGZO TFT. As shown in FIG. 11C, after long termoperation, Vth shift of the double gate IGZO TFT is less than Vth shiftof the single gate IGZO TFT. It is known that the light-induced negativebias stress (LNBS) stability of the IGZO TFT is worse than that of LTPSTFT. In the present disclosure, when the IGZO TFT has the double gatestructure, this instability can be decreased. In addition, since the Vthof the switching thin film transistor T2 decides Vref and Vdata, the lowOFF current properties and smaller Vth shift is benefit to theprecharge, compensation and data writing phase of the 4T2C circuitoperation in the display device of the present disclosure.

Alternative Embodiment 1

FIGS. 12A to 12C are schematic top views showing the relations betweenthe top gate electrodes and the semiconductor layer in the dual gatestructure of the present alternative embodiment.

In one aspect, as shown in FIG. 12A, the thin film transistor with thedual gate structure comprises: two semiconductor regions 831, 832; andtwo top gate electrodes 841, 842 respectively overlapping the twosemiconductor regions 831, 832. Herein, different voltage could beapplied to the two top gate electrodes 841, 842. And, the twosemiconductor regions 831, 832 can electrically connect to each other bya conductive unit 85. Examples of the material of the conductive unit 85can include metals, semiconductors, or other conductive materials.

In another aspect, as shown in FIG. 12B, the thin film transistor withthe dual gate structure comprises: a semiconductor layer 83; and two topgate electrodes 841, 842 overlapping the semiconductor layer 83. Herein,different voltage could be applied to the two top gate electrodes 841,842.

In further another aspect, as shown in FIG. 11C, the thin filmtransistor with the dual gate structure comprises: a semiconductor layer83; and a gate electrode 84. Herein, two parts of the gate electrode 84overlaps the semiconductor layer 83, and only one voltage is applied tothe gate electrode 84.

In the present alternative embodiment, only the relations between thetop gate electrodes and the semiconductor layer are exemplified. In thecase that the bottom gate has the dual gate (for example, FIG. 8), therelations between the bottom gate electrodes and the semiconductor layerare similar to those shown in FIGS. 12A to 12C, except that the bottomgate electrodes are disposed below the semiconductor layer.

The structures shown in the present alternative embodiment can beapplied to any one of the aforesaid embodiments.

Alternative Embodiment 2

FIG. 13 is a schematic cross sectional view of the display device of thepresent alternative embodiment. In the present alternative embodiment,the reset thin film transistor T3 can have the dual gate structure; andthe source or drain electrode of the LTPS TFT can electrically connectto the source or drain electrode of the IGZO TFT by direct contact.

Herein, the display device of Embodiment 2-2 (as shown in FIG. 9) isexemplified in the present alternative embodiment. The structures of thedisplay devices of Embodiment 2-2 and the present alternative embodimentare similar, except the following differences.

In Embodiment 2-2, the reset thin film transistor T3 has the single gatestructure. However, in the present alternative embodiment, the resetthin film transistor T3 has the dual gate structure, which comprises:two third semiconductor regions 321, 322; and two top gate electrodes351, 352 respectively overlapping the two third semiconductor regions321, 322.

In addition, in Embodiment 2-2, the first source electrode 13 iselectrically connected to the fourth drain electrode 44 via theconductive line 82. In the present embodiment, the first sourceelectrode 13 is electrically connected to the fourth drain electrode 44by direct contact.

The structure shown in the present alternative embodiment can be appliedto any one of the aforesaid embodiments.

Alternative Embodiment 3

FIGS. 14A and 14B are schematic cross sectional views of the displaydevice of the present alternative embodiment. In the present alternativeembodiment, the source or drain electrode of the LTPS TFT canelectrically connect to the source or drain electrode of the IGZO TFT bya conductive line; and the conductive line may be extended to overlapthe semiconductor layer of the LTPS TFT.

Herein, the display device of Embodiment 2-2 (as shown in FIG. 9) isexemplified in the present alternative embodiment. The structures of thedisplay devices of Embodiment 2-2 and the present alternative embodimentare similar, except the following differences.

In Embodiment 2-2, the conductive line 82 and the fourth semiconductorregions 421, 422 are not overlapped. In the aspect shown in FIG. 14A,the conductive layer 82 is extended and overlaps the fourthsemiconductor regions 421, 422. Therefore, the extended conductive layer82 can be used as a shielding layer for the LTPS TFT.

In the aspect shown in FIG. 14B, the fourth drain electrode 44 iselectrically connected to the first source electrode 13 via theconductive line 82 and further via a metal trace 821.

The structure shown in the present alternative embodiment can be appliedto any one of the aforesaid embodiments.

Alternative Embodiment 4

FIG. 15 is a schematic cross sectional view of the display device of thepresent alternative embodiment. In the present alternative embodiment,the conductive line may be extended to overlap the semiconductor layerof the LTPS TFT

Herein, the display devices of Embodiment 2-3 (as shown in FIG. 10) areexemplified in the present alternative embodiment. The structures of thedisplay devices of Embodiment 2-3 and the present alternative embodimentare similar, except the following differences.

In Embodiment 2-3, the conductive line 82 and the fourth semiconductorregions 421, 422 are not overlapped, and the conductive line 52 and thethird semiconductor regions 321, 322 are not overlapped. In the aspectshown in FIG. 15, the conductive layers 52, 82 are extended andrespectively overlap the fourth semiconductor regions 421, 422 and thethird semiconductor regions 321, 322. Therefore, the extended conductivelayers 52, 82 can be used as shielding layers for the LTPS TFTs.

The structure shown in the present alternative embodiment can be appliedto any one of the aforesaid embodiments.

In addition, a display device made as described in any of theembodiments of the present disclosure as described previously may beintegrated with a touch panel to form a touch display device. Moreover,a display device or touch display device made as described in any of theembodiments of the present disclosure as described previously may beapplied to any electronic devices known in the art that need a displayscreen, such as displays, mobile phones, laptops, video cameras, stillcameras, music players, mobile navigators, TV sets, and other electronicdevices that display images.

Although the present disclosure has been explained in relation to itsembodiment, it is to be understood that many other possiblemodifications and variations can be made without departing from thespirit and scope of the disclosure as hereinafter claimed.

What is claimed is:
 1. A display device, comprising: a substrate; alight emitting diode disposed above the substrate; a first transistordisposed above the substrate and comprising: a first semiconductorincluding a silicon semiconductor; a gate electrode disposed above thefirst semiconductor; and a first drain electrode electrically connectedto the first semiconductor, wherein the first drain electrode iselectrically connected to the light emitting diode; and a secondtransistor disposed above the substrate and comprising: a secondsemiconductor including an oxide semiconductor; and a second drainelectrode electrically connected to the second semiconductor, whereinthe second drain electrode is electrically connected to the gateelectrode of the first transistor.
 2. The display device of claim 1,wherein the second drain electrode is electrically connected to the gateelectrode of the first transistor via a metal bridge.
 3. The displaydevice of claim 1, wherein the display device comprises a first lightshielding element disposed under the first semiconductor.
 4. The displaydevice of claim 1, wherein the display device comprises a second lightshielding element disposed under the second semiconductor.
 5. Thedisplay device of claim 4, wherein the second light shielding element isa gate electrode of the second transistor.
 6. The display device ofclaim 1, wherein the display device comprises a capacitor electricallyconnected to the first transistor and the light emitting diode.
 7. Thedisplay device of claim 6, wherein the capacitor has two capacitorelectrodes, and one of the capacitor electrodes is electricallyconnected to the gate electrode of the first transistor.
 8. The displaydevice of claim 7, wherein the other of the capacitor electrodes is madeof the same material of the oxide semiconductor.